JPH01156776U - - Google Patents

Info

Publication number
JPH01156776U
JPH01156776U JP5221388U JP5221388U JPH01156776U JP H01156776 U JPH01156776 U JP H01156776U JP 5221388 U JP5221388 U JP 5221388U JP 5221388 U JP5221388 U JP 5221388U JP H01156776 U JPH01156776 U JP H01156776U
Authority
JP
Japan
Prior art keywords
coating device
container
spin coating
wall
porous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5221388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5221388U priority Critical patent/JPH01156776U/ja
Publication of JPH01156776U publication Critical patent/JPH01156776U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP5221388U 1988-04-20 1988-04-20 Pending JPH01156776U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5221388U JPH01156776U (en]) 1988-04-20 1988-04-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5221388U JPH01156776U (en]) 1988-04-20 1988-04-20

Publications (1)

Publication Number Publication Date
JPH01156776U true JPH01156776U (en]) 1989-10-27

Family

ID=31278220

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5221388U Pending JPH01156776U (en]) 1988-04-20 1988-04-20

Country Status (1)

Country Link
JP (1) JPH01156776U (en])

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010109118A (ja) * 2008-10-30 2010-05-13 Shibaura Mechatronics Corp 基板処理装置および基板処理方法
JP2014027201A (ja) * 2012-07-30 2014-02-06 Dainippon Screen Mfg Co Ltd 基板処理装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5372464A (en) * 1976-12-08 1978-06-27 Matsushita Electric Ind Co Ltd Method and apparatus for rotary coating
JPS5652745A (en) * 1979-10-05 1981-05-12 Matsushita Electric Ind Co Ltd Method and apparatus for applying photosensitive resin
JPS5745237A (en) * 1980-09-01 1982-03-15 Fujitsu Ltd Rotary processing device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5372464A (en) * 1976-12-08 1978-06-27 Matsushita Electric Ind Co Ltd Method and apparatus for rotary coating
JPS5652745A (en) * 1979-10-05 1981-05-12 Matsushita Electric Ind Co Ltd Method and apparatus for applying photosensitive resin
JPS5745237A (en) * 1980-09-01 1982-03-15 Fujitsu Ltd Rotary processing device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010109118A (ja) * 2008-10-30 2010-05-13 Shibaura Mechatronics Corp 基板処理装置および基板処理方法
JP2014027201A (ja) * 2012-07-30 2014-02-06 Dainippon Screen Mfg Co Ltd 基板処理装置

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